XAD-μ uses multi-guide capillary focusing XRF and multi-guide capillary technology to easily handle the measurement and analysis of thin coatings and extremely thin coatings at ultra-small measurement points. It has shown its advantages in the automatic test and analysis of coating thickness and composition of flexible circuit boards, chip packaging, and wafer micro-areas. It mainly uses the principle of total X-ray reflection. The X-ray beam excited from the X-ray tube is transmitted in a total reflection manner on the inner wall of the capillary glass tube. The bending of the capillary glass tube is used to change the transmission direction of the X-rays, thereby achieving X-ray convergence and increasing the intensity of the X-rays by 2 to 3 orders of magnitude.

Multi-guide capillary focusing optics can achieve beam sizes as small as 5um